Energy of ionic and auxiliary bombard is opposite the influence of kind of diamond film function

99% ) . Choice Si (100) regard film as matrix, rms of its surface surface roughness is about 0.

2 Nm. Working gas is argon gas, background vacuum of the system is 8 × 10-4Pa, working atmospheric pressure is 6 × 10-3Pa. Before the experiment, clean Si with acetone, alcohol (100) matrix, put vacuum room next, the Ar + ion that is 3 KeV with energy is splashed shoot clean 10min. Black lead target is 3 KeV with energy, bundle shed the Ar + ion that is 120 MA to splash shoot. In the meantime, deposit DLC film also assists bombard with Ar + ion, ion of change Ar + assists the energy of bombard, can win different DLC film. The auxiliary bombard energy of this anthology choose is 100, 200, 400, 600 with 800 EV. Filmy ply is measured with appearance of appearance of form of surface of the type that hit a needle. All filmy ply in the article are 400 Nm about. The exterior surface roughness of DLC film uses nuclear power microscope (AFM) measure. The pinpoint radius of nuclear power microscope is 40 Nm about, material is Si3N4. Filmy hardness uses Knoop sclerometer and accept rice sclerometer to measure respectively. Measure Knoop microscopical the load that uses when hardness is 0.

1N. Measuring what use when accept rice hardness is Berkovich diamond pinpoint, load is 1 MN, with Oliver and Pharr model [7] computation. To reduce experimental error, hardness is worth the average that is measured value 5 times. The micromechanism of DLC film pulls graceful chart analysis with laser, laser wavelengh is 488 Nm. The tribology function of DLC film uses a ball - dish attrition experiment device checks. The material of the ball is ZrO2, diametical 3mm, rms of exterior surface roughness is 10nm about. The load that uses in attrition experiment is 40 MN, sliding velocity is 1 Mm/s. The ZrO2 ball that uses in the experiment undertakes with acetone before use supersonic clean, and every time the experiment all uses new ZrO2 ball. The relative humidity of the environment when attrition experiment is (50 ± 1)% . 2 tests result and discuss 2.

1 micromechanism pursues the laser with the 1 filmy DLC that is the deposit when auxiliary bombard energy is 400 EV plays graceful music. If plan institute is shown, in pulling graceful chart to include two, the heart is located in 1550 Cm-1 respectively (G peak) with 1360 Cm-1 (D peak) the wide peak around. The intensity of D peak and G peak is compared (Id/Ig) with the Sp 2 in film and content of Sp 3 key than becoming direct ratio, increase along with the grow in quantity of content of Sp 2 key [8] . Express the 1 Id/Ig value that is the film when energy of different and auxiliary bombard. From the watch 1 in can see, when auxiliary bombard energy is 400 EV, id/Ig value is the least, that is to say content of Sp 3 key is the right now biggest. Because,this is, destroy binding energy to inferior Sp 2 bolts and can't destroy binding energy when enough of auxiliary bombard energy only when taller Sp 3 bolts, the Sp 3 that just can obtain higher content bolts [9] . In addition, when moderate of auxiliary bombard energy, the atomic activity sex of filmy surface increases because of ionic bombard, this also is helpful for the formation of Sp 3 key. But, should assist bombard when energy is too high, ionic meeting destroys filmy surface and make filmy graphitization. Graphitization is a thermodynamic course that changes to Sp 2 key by Sp 3 key, accordingly, existence agrees with the optimal energy limits that Sp 3 key forms. The ion of value Table 1 Id/Ig At Different Ion Bombardment Energy that expresses 1 different ion to assist the Id/Ig below bombard energy assists EV I D /I G 100 1 of bombard energy ／ .

25 200 0.

89 400 0.

76 600 0.

84 800 0.

96 graphs the laser of film of the DLC when 1 ion assists bombard energy to be 400eV pulls graceful chart Fig.

1Raman Spectrum Of The DLC Film Deposited At 400 EV Ion Bombardment Energy 2.

2 surfaces surface roughness 　 　 　 pursues the 2 AFM image that are surface of the film when auxiliary bombard energy is 400 EV and 800 EV respectively. The Rms of filmy exterior surface roughness when 400 EV is about 0.

15 Nm, this compares Si (100) the surface roughness of matrix is even small. Graph the AFM image of film of DLC of the earning below energy of 2 different and ionic auxiliary bombard (A)400 EV; (B)800 EV sweep range: 2 μ of × of 2 μ M M, upend direction coordinate is 5nm/ case Fig.

2AFM Images Of The DLC Films Deposited At Different Ion Bombardment Energy (a)400 EV; (2 μ of × of M of μ of B)800 EV The Scan Area Is 2 M, 　 of The Vertical Scale Is 5nm/p Nextpage pursues the 3 exterior surface roughness that are DLC film and the concern plan that assist bombard energy. If the graph is shown 3 times, when auxiliary bombard energy is less than 400 EV, exterior surface roughness is reduced along with the accretion of bombard energy. When auxiliary bombard energy is more than 400 EV, exterior surface roughness increases along with the accretion of bombard energy. Because,this is, when moderate of auxiliary bombard energy, the height that the activity of filmy surface atomic that causes as a result of ionic bombard action can make filmy surface is nodded each tends consistent, make exterior surface roughness is reduced thereby. However, should assist bombard when energy is too high, ion is right of filmy surface splash shoot action to be able to make exterior surface roughness increases. The exterior surface roughness of film of graph 3 DLC and ion assist the relation Fig of bombard energy.

3Surface Roughness Of The DLC Films As A Function Of Different Ion Bombardment Energy2.

3 flexibility and hardness 　 graph 4 it is the to load that the hardness place that measures DLC film with accept rice sclerometer obtains - uninstall a curve. By to load - the flexibility that uninstalls a curve to be able to estimate film [10] . Definition R=(h Max -h Res)/h Max is stretch reply coefficient, among them H Max is the impress deepness when the biggest load, h Res is the leftover deepness of the impress after uninstalling. The definition according to R is knowable, the value of R is greater, filmy flexibility is bigger. Inside article test range, when 100 EV only R value is less than 80% , the value of the R below the others circumstance all is more than 85% (100 EV:70.

6% , 200 EV:85.

6% , 400 EV:93.

4% , 600 EV:86.

7% , 800 EV:90.

1% ) , film of the DLC when this explains auxiliary bombard energy is more than 100 EV has first-rate flexibility. Be worth R and express 1 medium data to be illuminated relatively, apparent ground sees I D /I G is smaller, r value is greater. Accordingly, sp 3 bolts the addition of content conduces to the flexibility that increases DLC film. Graph the to load of film of DLC of the earning when sclerometer of 4 the rice that use offer measure 100eV and 200eV - uninstall curvilinear Fig.

4Nano-indentation Load Versus Displacement Curves Obtained From The DLC Films Deposited At 100 EV And 200 EV Ion Bombardment Energy, respectively 　 pursues the 5 Knoop that are DLC film are microscopical the relation between hardness and accept rice hardness and auxiliary bombard energy. By the graph 5 can see, the maximum of Knoop hardness and the least value appear in 400 EV and 100eV respectively. Be worth contrast to be able to see with R of stretch reply coefficient, the DLC film that has coefficient of high stretch return also has tall hardness. This phenomenon explains Sp 3 bolts filmy to DLC hardness and flexibility have same effect. Accordingly, can win the DLC film that has tall hardness and tall flexibility at the same time. If the graph is shown 5 times, accept rice hardness is less than Knoop apparently microscopical hardness, and those who follow auxiliary bombard energy is different and change is not apparent. The measurement that causing the account with accept rice hardness and Knoop different hardness is both and computational method are different. Above all, the bulk that Knoop hardness is impress of the remains after the basis is uninstalled comes calculative, and accept rice hardness is be in according to pressure head the biggest pressure deep when the umbriferous area of impress will calculate of hardness. The stretch reply after because impress is in,be being uninstalled makes Knoop hardness compares accept rice hardness big. Additional, because DLC film has very tall flexibility, make using Oliver and Pharr model [7] the hardness that film can underestimate when hardness of computational accept rice. Because,this is, the model of Oliver and Pharr [7] in uninstalling a process, hypothesis pressure head and the osculatory area between the material that be measured are constant, however, because the tall flexibility of DLC film makes,osculatory area is in whole in uninstalling a process, changing ceaselessly, bring about thereby overestimate osculatory area, make the measured value of hardness is less than real value. Graph 5 Knoop are microscopical the metabolic rule Fig that hardness and accept rice hardness assist bombard energy along with ion.

5Knoop Microhardness And Nanohardness As A Functionof Ion Bombardment Energy2.

4 coefficient of friction pursue 6 it is the metabolic attempt that coefficient of friction follows slip time. If the graph is shown 6 times, when auxiliary bombard energy is 400 EV and 100 EV, the coefficient of friction of DLC film is respectively the biggest with the least value. The analytic result contrast with above can see, the film that has taller hardness and inferior surface surface roughness has inferior coefficient of friction at the same time. If pursue,the AFM image place of 3 is shown, the density that the filmy contact with exterior big surface roughness nods and slope of each bits are bigger, cause bigger coefficient of friction thereby. The film of taller hardness can bear the weight of effectively, make be out of shape filmily reduce, make the osculatory area between film and slip ball is reduced thereby, this also is helpful for reducing coefficient of friction. Accordingly, the hardness that increases film, reduce exterior surface roughness to conduce to the coefficient of friction that reduces film. After attrition experiment, in DLC film with optical microscope the surface does not have discovery to grind mark. Graph the metabolic Fig that the coefficient of friction of film of DLC of the earning below energy of 6 different and ionic auxiliary bombard lets attrition time.

6The existence when conclusion of The Relationship Between Friction Coefficientof The DLC Films Deposited At Different Ionbombardment Energy And Sliding Time3 uses film of DLC of IBAD method deposit is helpful for Sp 3 bolting the first-rate that form assists bombard energy limits. The Sp 3 in DLC film bolts the addition of content can reduce filmy exterior surface roughness, increase filmy flexibility and hardness, reduce coefficient of friction. Of DLC film microscopical difference exists between hardness and accept rice hardness. When using accept rice sclerometer to check the hardness of expensive stretch stuff, can make the measured value of hardness far be less than its real value. CNC Milling